Applied Materials' E3 Equipment Control System Optimizes Process Control for Micron Technology

Micron Technology, Inc. announced today that it has started the deployment of the Applied Materials E3 framework within its 300mm fabrication facilities. Applied E3 is an integrated engineering system that allows sophisticated control strategies aimed at increasing product performance, raising product yield and improving quality.

Applied Materials offers software packages for automating the operation of complex manufacturing environments. These include tool automation, manufacturing execution systems, materials control, simulation and scheduling software and related software support services.

In a press release issued, Micron said:

‘Since the adoption of E3, Micron's engineering teams have enabled fault detection and classification (FDC) to predict and avoid unexpected equipment downtime and prevent product deviations, run-to-run control (R2R) to adjust processing parameters in real time and equipment performance tracking (EPT) to identify factory bottlenecks to quantify process variability. With the statistical process control (SPC) module, Micron's 300mm facilities will further improve efficiency and product quality while reducing the CoO.”

Read the press release for more information about this announcement.